Getting My Noohapou To Work
Getting My Noohapou To Work
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The POU3500 process delivers dynamic temperature control of the process chamber cathode / electrode / anode and may be synchronized with any etch approach.
thirty% of its peak electrical power consumption, providing our shoppers sizeable reduction in working costs and amplified reliability.
Along with the POU3500, you could attain unparalleled brings about etch effectiveness, chamber uptime, lessened expense of possession and fab House utilization – all though improving your procedure reliability.
Originally Established in 1985, our corporation has grown right into a regarded leader in giving temperature Command systems to the worldwide semiconductor industry.
This extraordinary system, offering a little variety issue, low price-of-possession and Dynamic Temperature Command offered approach and devices engineers a different Instrument to enhance their temperature sensitive procedures.
we've been guided in our belief that prosperity On this aggressive marketplace stems from delivering buyers with extremely engineered new merchandise and environment class customer care.
The accuracy from the POU 3500 allows for independent Charge of the method fluid temperature towards the wafer chuck inside +/- 0.one °C of set stage, and also the rapidly response time from the program makes it possible for for optimum wafer-to-wafer repeatability all through the etch system.
With our unit strategically mounted close to six feet from the chamber, we reach a way more accurate reading through in the chuck temperature. This method ensures regular temperature through the manufacturing good deal, bringing about enhanced wafer-to-wafer CD uniformity.
The data pertains to your 300mm chamber temperature profile all through a substantial component ratio Etch system, functioning at quite significant RF ability situations (~three.8kW). The powerful elements of this information set are:
LAUDA-Noah is Assembly these new worries and it has included Vitality preserving engineering in techniques which can be pleasant to your setting and possess a low priced to function.
the info set Here's from the 200mm volume manufacturing wafer fab and Obviously illustrates the benefit of the LAUDA-Noah POU technique.
a lot more than at any time, shrinking gadget geometries, demanding new procedures along with a highly competitive natural environment have to have temperature Regulate devices that Blend speedy and precise temperature Command using an emphasis on lessened operating expenditures and enhanced reliability.
The reality is always that correct Dynamic Temperature Handle can only be reached when all five (5) of the subsequent process structure and installation prerequisites are satisfied:
(for that reason, click here putting in a static unit close to chamber won't permit it to deliver dynamic temperature control)
We know that fantastic items tend to be the result of good customer opinions and the applying of progressive technology. We strive to develop price for our prospects via a method that allows The shopper impact our objectives, objectives, product or service developments and business enterprise tactics.
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